South Korean memory chipmaker SK Hynix and industrial gas manufacturer TEMC have jointly developed neon gas recycling technology, marking a breakthrough for the chipmaking industry, as reported by the Korea Economic Daily on April 1. The technology involves collecting discharged neon gas used for lithography, a critical process of chipmaking, with a scrubber and then purifying it for reuse using TEMC’s gas treatment process. Currently, SK Hynix has achieved a neon recovery rate of 72.7%, planning to soon raise the rate to 77%. The company aims to reduce its reliance on neon gas imports with this recycling technology, which is expected to help save as much as KRW40bn (USD30m) per year.

Neon is a crucial process gas, especially in the semiconductor industry. It serves as a buffer gas forexcimer lasers or ultraviolet lasers used in lithography. Typically, chipmakers release neon gas into the air after use in the lithography process. However, the production disruption caused by the Russian invasion of Ukraine has spiked the prices for neon gas, as Ukraine produces more than half of the world’s neon gas. Aside from ensuring a steady neon gas supply, the adoption of the recycling technology also contributes to the decarbonization of thecarbon-intensive chipmaking industry. SK Hynix estimates that this technology could cut its greenhouse gas emissions by 12,000 tons annually. Additionally, the company plans to develop recycling technologies for other gases used in chip manufacturing, including deuterium, hydrogen, helium, and sulfuric acid by 2025.

Sources:

https://www.kedglobal.com/korean-chipmakers/newsView/ked202404010017

https://news.skhynix.com/sk-hynix-teams-up-with-local-partners-to-develop-pioneering-neon-gas-recycling-tech/